| 摘要 |
The present invention relates to a quaternary system coating having high-hardness and low-friction characteristics, thus applied to airplanes, conveying machinery, and other tools, and a method for manufacturing the same. Chromium is supplied as a Cr target through a magnetron sputtering using a DC pulse within a single chamber. Titanium and boron are supplied as TiB_2 through a high-voltage impulse magnetron sputtering. Nitrogen is supplied by injecting nitrogen gas inside the chamber. Thereby, when forming a coating film at approximately 200°C which is relatively a low temperature, a crystalline Cr-Ti-B-N coating film can be directly manufactured without any post process such as annealing. |
