发明名称 |
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING DEVICE AND METHOD FOR ACCUMULATING DATA FOR SUBSTRATE PROCESSING DEVICE |
摘要 |
<p>A substrate processing system includes a monitored data receiving unit receiving a plurality of types of monitored data; a temporary memory unit periodically storing the monitored data; a monitored data rate detection unit detecting, as a monitored data rate, a total number of times each type of monitored data changes during a first time period by more than a predetermined amount; a monitored data writing allocation unit allocating a storing frequency to each type of monitored data based on the monitored data rate and an upper limit; a monitored data writing unit writing the monitored data to the temporary memory unit during the second time period based on the storing frequency; an accumulative memory unit storing the monitored data for a plurality of periods; and an accumulative data writing unit reading the monitored data for every third time period and storing the monitored data in the accumulative memory unit.</p> |
申请公布号 |
KR20140101377(A) |
申请公布日期 |
2014.08.19 |
申请号 |
KR20147016440 |
申请日期 |
2012.12.05 |
申请人 |
HITACHI KOKUSAI ELECTRIC INC. |
发明人 |
KOYAMA YOSHITAKA;IWAKURA HIROYUKI |
分类号 |
H01L21/66;H01L21/02 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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