| 发明名称 | Scanning electron microscope | ||
| 摘要 | A scanning electron microscope includes a main scanning electron microscope unit having an electron optical column and a sample chamber, a controller over the main scanning electron microscope unit, a single housing that houses both the main scanning electron microscope unit and the controller, and a bottom plate disposed under the single housing, the main scanning electron microscope unit and the controller. A first leg member is attached to a bottom face of the bottom plate on a side of the controller with a first opening hole provided through the bottom plate on a side of the main scanning electron microscope unit, and a damper is fixed to a bottom face of the main scanning electron microscope unit and disposed through the first opening hole. | ||
| 申请公布号 | US8809782(B2) | 申请公布日期 | 2014.08.19 |
| 申请号 | US201013387424 | 申请日期 | 2010.07.20 |
| 申请人 | Hitachi High-Technologies Corporation | 发明人 | Ohtaki Tomohisa;Ajima Masahiko;Ito Sukehiro;Onuma Mitsuru;Omachi Akira |
| 分类号 | H01J37/00;H01J37/16;F16F15/04;H01J37/28 | 主分类号 | H01J37/00 |
| 代理机构 | Antonelli, Terry, Stout & Kraus, LLP. | 代理人 | Antonelli, Terry, Stout & Kraus, LLP. |
| 主权项 | 1. A scanning electron microscope comprising, a main scanning electron microscope unit including an electron optical column and a sample chamber, a control means over the main scanning electron microscope unit, a single housing that houses both the main scanning electron microscope unit and the control means, a bottom plate disposed under the single housing, the main scanning electron microscope unit and the control means, a first leg member attached to a bottom face of the bottom plate on a side of the control means, a first opening hole through the bottom plate on a side of the main scanning electron microscope unit, and a damper fixed to a bottom face of the main scanning electron microscope unit and disposed through the first opening hole. | ||
| 地址 | Tokyo JP | ||