发明名称 Method of preparing zinc oxide nanorods on a substrate by chemical spray pyrolysis
摘要 A method of preparing nanostructured zinc oxide layers on a substrate by chemical spray pyrolysis at moderate deposition temperatures from 350.degree. C. to 600.degree. C. is disclosed. An aqueous or aqueous alcoholic solution comprising zinc chloride or zinc acetate as precursors is prepared and sprayed onto the preheated substrate so that the precursor reacts to form zinc oxide layer on the substrate. Thiourea or urea may be also added to the solution. Glass, silicon, or metal oxide covered glass can be used as the substrate.
申请公布号 US8808801(B2) 申请公布日期 2014.08.19
申请号 US201313851266 申请日期 2013.03.27
申请人 发明人 Krunks Malle;Oja-Acik Ilona;Dedova Tatjana
分类号 B05D3/02;H01L21/02;C23C4/10 主分类号 B05D3/02
代理机构 Maine Cernota & Rardin 代理人 Maine Cernota & Rardin
主权项 1. Method of preparing nanostructured zinc oxide (ZnO) layers said layer comprising nanostructures chosen from the group of nanostructures consisting of ZnO nanorods and nanoneedles, on a substrate selected from a group consisting of Silicon, glass and quartz, said substrate having a first surface coated in a metal oxide, and a second surface, the method comprising the steps of: heating the substrate to a predetermined temperature, wherein said predetermined temperature is from 350° C. to 650° C.; atomizing a solution, comprising a precursor, an additive, and a solvent, into small discrete droplets using spray technique, wherein said precursor is selected from the group consisting of zinc chloride (ZnCl2) and zinc acetate (Zn(CH3COO)2) and said additive is selected from the group consisting of thiourea (SC(NH2)2) and urea (OC(NH2)2); and depositing the atomized solution on the first surface of the substrate, using predetermined solution feeding rate, whereas the solvent evaporates when reaching the substrate, and said precursor reacts to form the nanostructured zinc oxide layer.
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