Disc vapor lubrication

摘要

A method comprising introducing a workpiece support into a chamber of an apparatus. The workpiece support is for supporting thereon a plurality of workpieces. The apparatus comprising: the chamber having an interior space configured to be maintained at a pressure below atmospheric pressure; a vapor source for supplying the interior space of the chamber with a linearly extending stream of lubricant vapor; the workpiece support for supporting thereon a plurality of workpieces with surfaces facing the vapor source; and a conveyor for continuously moving the workpiece support transversely past the linearly extending stream of lubricant vapor from the vapor source. The method also comprising continuously moving the workpiece support with the plurality of workpieces supported thereon transversely past the linearly extending stream of lubricant vapor from the vapor source and depositing a uniform thickness film of the lubricant on at least one surface of each of the plurality of workpieces.

主权项

1. A method comprising:
introducing a workpiece support into a chamber of an apparatus, said workpiece support for supporting thereon a plurality of workpieces, wherein said apparatus comprises:
said chamber having an interior space configured to be maintained at a pressure below atmospheric pressure;a vapor source for supplying said interior space of said chamber with a linearly elongated stream of lubricant vapor, said vapor source comprising a reservoir having a plurality of recesses, with each of the plurality of recesses configured to have a different diameter and a different depth thereby containing a different volume, and wherein said plurality of recesses function to at least minimize variability of a molecular weight distribution of said lubricant vapor;said workpiece support for supporting thereon a plurality of workpieces with surfaces facing said vapor source; anda conveyor for continuously moving said workpiece support transversely past said linearly elongated extending stream of lubricant vapor from said vapor source; continuously moving said workpiece support with said plurality of workpieces supported thereon transversely past said linearly elongated extending stream of lubricant vapor from said vapor source and depositing a uniform thickness film of said lubricant on at least one surface of each of said plurality of workpieces.