METHOD FOR FORMING NANO CRYSTALLINE AND MANUFACTURING OF ORGANIC LIGHT EMITTING DISPLAY DEVICE INCLUDING THE SAME

摘要

Provided are a method for forming a nano-crystal and a method for manufacturing an organic light emitting display device including a thin film with the nano-crystal. The method for forming the nano-crystal includes the steps of: forming a metal compound thin film by a reactive sputtering process at first pressure; and forming the nano-crystal in the metal compound thin film by the reactive sputtering process at second pressure which is lower than the first pressure.