Method and system of mask data preparation for curvilinear mask patterns for a device

摘要

A method comprises: (a) transforming a layout of a layer of an integrated circuit (IC) or micro electro-mechanical system (MEMS) to a curvilinear mask layout; (b) replacing at least one pattern of the curvilinear mask layout with a previously stored fracturing template having approximately the same shape as the pattern, to form a fractured IC or MEMS layout; and (c) storing, in a non-transitory storage medium, an e-beam generation file including a representation of the fractured IC or MEMS layout, to be used for fabricating a photomask.

主权项

1. A method, comprising:
(a) using a computer to transform a layout of a layer of a device to a mask layout having a plurality of main patterns and a plurality of assist features for patterning the layout on a resist; (b) determining a pattern type of at least one of the main patterns; (c) determining a pattern angle for the at least one main pattern; (d) selecting a previously stored fracturing template corresponding to the determined pattern type and pattern angle from a fracturing template library, wherein the fracturing template library is indexed by pattern type and pattern angle; and (e) replacing the at least one main pattern with the selected fracturing template, so as to provide approximately the same shape as the at least one main pattern of the mask layout; (f) storing, in a non-transitory storage medium, an e-beam generation file including a representation of the layout after the replacing, to be used for fabricating a photomask.