| 发明名称 | Method of forming a piezoelectric actuator of an inkjet head | ||
| 摘要 | A method of forming a piezoelectric actuator on a vibration plate to provide a driving force to each of a plurality of pressure chambers includes forming a lower electrode on the vibration plate, forming a piezoelectric layer on the lower electrode at a position corresponding to each of the pressure chambers, forming a supporting pad on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, forming an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad, and bonding the upper electrode to a driving circuit above the supporting pad to receive a voltage from the driving circuit. | ||
| 申请公布号 | US8806727(B2) | 申请公布日期 | 2014.08.19 |
| 申请号 | US201012712442 | 申请日期 | 2010.02.25 |
| 申请人 | Samsung Electro-Mechanics Co., Ltd. | 发明人 | Lee Tae-kyung;Chung Jae-woo;Lee Kyo-yeol;Lee Hwa-sun;Lim Seung-mo;Lee Jae-chang |
| 分类号 | H04R17/00 | 主分类号 | H04R17/00 |
| 代理机构 | Stanzione & Kim, LLP | 代理人 | Stanzione & Kim, LLP |
| 主权项 | 1. A method of forming a piezoelectric actuator of an inkjet head, the piezoelectric actuator being formed on a vibration plate to provide a driving force to each of a plurality of pressure chambers, the method comprising: forming a lower electrode on the vibration plate; forming a piezoelectric layer on the lower electrode at a position corresponding to each of the pressure chambers; forming a supporting pad on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer; forming an upper electrode that extends from a top surface of the piezoelectric layer to a top surface of the supporting pad; and bonding a driving circuit to the upper electrode above the supporting pad to apply a voltage to the upper electrode. | ||
| 地址 | Suwon-si KR | ||