Vision measuring device and auto-focusing control method

摘要

A vision measuring device includes: a camera which images a workpiece and transfers image information of the workpiece; a position control unit which controls an in-focus position of the camera and outputs the in-focus position as position information representing a position in a Z-axis direction; and a vision measuring machine which performs vision measurement on the workpiece based on image information and position information. The position control unit acquires and retains position information in response to a trigger signal output from the camera or the position control unit to the other at a certain timing of an imaging period during which the camera images the workpiece. The vision measuring machine calculates position information representing a position of image information in the Z-axis direction based on image information transferred from the camera and position information output from the position control unit, and performs auto-focusing control.

主权项

1. A vision measuring device, comprising:
imaging device which images a measurement target and transfers image information representing an image of the measurement target; position control device which controls an in-focus position of the imaging device and outputs the in-focus position as position information representing a position in an in-focus axis direction; and vision measuring device which performs vision measurement on the measurement target based on the image information and the position information, wherein: the position control device acquires and retains the position information at a certain imaging timing of the imaging device; and the vision measuring device performs plural times of auto-focus searches along the in-focus axis direction by varying at least one of a moving velocity and a moving direction each time, obtains an amount of gap between the imaging timing and a timing at which the position information is acquired based on the image information transferred from the imaging device in each auto-focus search and the position information output from the position control device in each auto-focus search, and compensates for an in-focus position obtained in each auto-focus search based on the obtained amount of gap.