Water-reactive Al composite material, water-reactive Al film, process for the production of the Al film, and constituent member for film-forming chamber

摘要

Provided herein are a water-reactive Al composite material which comprises 4NAl or 5NAl, as an Al raw material, containing, on the basis of the amount of the Al raw material, added Bi in an amount ranging from 0.8 to 1.4% by mass and Si, including the Si as an impurity of the Al raw material, in a total amount ranging from 0.25 to 0.7% by mass; a thermally sprayed Al film produced using this Al composite material; a method for the production of this Al film; and a constituent member for a film-forming chamber, which is provided, on the surface, with the thermally sprayed Al film.

主权项

1. A water-reactive Al composite material consisting essentially of:
4NAl or 5NAl, as an Al raw material; Bi in an amount ranging from 0.8 to 1.4% by mass on the basis of the amount of Al; Si, including the Si as an impurity of the Al raw material, in an amount ranging from 0.25 to 0.7% by mass on the basis of the amount of Al; and a total amount of less than 0.01% by mass (on the basis of the amount of Al) of elements in the composition other than Al, Bi and Si.