| 主权项 |
1. A micromechanical component for detecting an acceleration, comprising:
a substrate; an insulating layer on the substrate; a conductive layer on the insulating layer having a first and a second electrode; and a rotatable flywheel mass in the form of a rocker having a first and a second lever arm, the first lever arm being situated opposite the first electrode, and the second lever arm being situated opposite the second electrode, the first lever arm having a first hole structure having a number of first cut-outs, the second lever arm having a second hole structure having a number of second cut-outs, the first electrode having a third hole structure having a number of third cut-outs, the second electrode having a fourth hole structure having a number of fourth cut-outs, the third hole structure of the first electrode differing from the fourth hole structure of the second electrode, and the first and second lever arms having different masses; wherein outer dimensions of the first and second lever arms correspond, and the first hole structure of the first lever arm differs from the second hole structure of the second lever arm, wherein at least one of the first and second electrodes have regions without cut-outs, wherein at least one of the first and second hole structures have additional cut-outs provided above the regions without cut-outs, the additional cut-outs having smaller dimensions than the corresponding at least one of the first and second cut-outs, wherein the insulating layer is partially removed such that a residual component of the insulating layer remains in the regions without cut-outs but not in the region with cut-outs. |
