| 主权项 |
1. A method of manufacturing a printhead including a filter comprising:
providing a substrate, a first portion of the substrate defining a plurality of nozzles, a second portion of the substrate defining a plurality of liquid chambers, each liquid chamber of the plurality of liquid chambers being in fluid communication with a respective one of the plurality of nozzles; providing a filter membrane structure, the filter membrane structure including a first material layer and a second material layer including a plurality of perimeter chambers, each of the perimeter chambers being in fluid communication with one of the liquid chambers; laminating the filter membrane structure to the second portion of the substrate, each liquid chamber of the plurality of liquid chambers being in fluid communication with a distinct portion of the filter membrane structure; and forming pores in the filter membrane structure using a photo-lithography process, wherein laminating the filter membrane structure to the second portion of the substrate includes laminating the first material layer to the second material layer and laminating the second material layer to the second portion of the substrate, and forming the pores in the filter membrane structure using a photo-lithography process includes forming the pores in the first material layer, and wherein the plurality of perimeter chambers are formed after laminating the second material layer to the second portions and prior to laminating the first material layer to the second material layer. |
