| 摘要 |
According to one embodiment, a coating apparatus includes a stage having a mounting surface on which a coating target is mounted, a rotating mechanism that rotates the stage, a coating nozzle that discharges a coating material, a moving mechanism that moves the coating nozzle, a supply device that supplies a material to the coating nozzle, an ejection device that ejects the material, a communication tube that allows the supply device, and a valve device. Further, the coating apparatus includes a control unit which rotates the stage by the rotating mechanism, switches the valve device to achieve the continuity of the supply unit and the coating nozzle, drives the moving mechanism to move the coating nozzle, and applies the coating material to the coating target on the stage. |
