Transfer robot and equipment front end module including transfer robot with vent part

摘要

A transfer robot according to the embodiment includes an arm unit, a base unit, a guide unit, a lifting unit, and a vent part. The arm unit includes a robot hand capable of holding an object to be transferred. The base unit is formed into a substantially box shape. The guide unit includes a vertical shaft vertically arranged in the base unit. The lifting unit is provided to be raisable and lowerable along the vertical shaft and supports the arm unit at an upper end portion. The vent part is opened in an upper surface of the base unit and vents downflow from an outside to an inside of the base unit.

主权项

1. A transfer robot comprising:
an arm unit that includes a robot hand capable of holding an object to be transferred; a base unit formed into a substantially box shape; a guide unit that includes a vertical shaft vertically arranged in the base unit; a lifting unit that is provided to be raisable and lowerable along the vertical shaft and supports the arm unit at an upper end portion; and a vent part that is opened in an upper surface of the base unit and vents downflow of air from an outside to an inside of the base unit, wherein the vent part is such that a width of a portion corresponding to an upper portion of the guide unit in the upper surface of the base unit is set larger than a width of a portion that does not correspond to the upper portion of the guide unit in the upper surface of the base unit, and wherein the vertical shaft is disposed in the width of the portion corresponding to the upper portion of the guide unit in the upper surface of the base unit that is set larger.