Multi-generational carrier platform

摘要

A multi-generational carrier platform is configured to carry substrate carriers of different sizes depending on processing needs. Multiple carrier adaptors are provided on one side of a support plate, and substrate carriers can be distributed among the carrier adaptors to mount a maximum number of substrates under the constraint of non-overlap of the substrates and the substrate carriers. The multi-generational carrier platform can be configured to provide rotation to each substrate carrier mounted thereupon, and is compatible with chemical mechanical planarization processes that require rotation of substrates against an abrasive surface. The multi-generational carrier platform facilitates maximum utilization of a processing area provided by a tool configured to process substrates of different sizes.

主权项

1. An apparatus comprising a processing apparatus, a carrier platform, and a frame assembly,
wherein said processing apparatus is configured to process at least one substrate, wherein said frame assembly is stationary relative to a structure to which said apparatus is affixed and comprises a horizontal track; wherein said carrier platform comprises a vertical stack of a proximal carrier platform compartment and a vertical carrier platform compartment that are structurally stationary relative to each other, wherein said proximal carrier platform is configured to mount N carrier adaptors thereupon, wherein each of said N carrier adaptors is configured to hold a substrate carrier for mounting a single substrate thereupon, and N is an integer greater than 2, wherein a set of transport actuation structures is attached to said distal carrier platform compartment, moves with said distal carrier platform compartment, and enables said carrier platform to slide into, and out of, a region underlying, or overlying, said processing apparatus through a linear lateral motion on said horizontal track, wherein said processing apparatus and said carrier platform are configured to move relative to each other, while said carrier platform underlies or overlies said processing apparatus and is located at a portion of said horizontal track overlying or underlying said processing apparatus, along a vertical direction that is perpendicular to a direction of said linear lateral motion.