Method and apparatus for organic vapor printing

摘要

In one embodiment, the disclosure relates to providing a first gas stream carrying vaporized material and depositing the vaporized material onto a substrate by directing a plurality of gas streams containing the vaporized material to a substrate, forming an gas curtain around the streams to prevent its dissemination beyond a target print area, and allowing the vaporized material to condense on the target print area. In another embodiment, heat is used to regulate the flow of the material and the thickness of the deposited layer.

主权项

1. A method for printing a plurality of discrete film segments of substantially uniform thickness over a target print area, comprising:
providing an array of multipore nozzles, wherein each multipore nozzle is fabricated to have a plurality of micropores arranged in a pattern and further wherein each multipore nozzle is configured to deposit a discrete film segment over the target print area; directing a gas stream comprising a carrier gas carrying a vaporized material through the array of multipore nozzles, wherein the gas stream is divided into a plurality of micron-scale gas sub-streams by the plurality of micropores in the multipore nozzles, each gas sub-stream comprising the carrier gas carrying the vaporized material; directing the gas sub-streams comprising the carrier gas carrying the vaporized material onto a substrate; and condensing the vaporized material on the substrate to form a plurality of substantially solid discrete film segments; wherein the plurality of micron-scale gas sub-streams from each multipore nozzle are positioned relative to each other to deposit a discrete film segment having a substantially uniform film thickness profile over the target print area.