| 摘要 |
The present invention relates to a semiconductor process pipe management system and pipe management method capable of performing the maintenance and history management of a pipe installed in a semiconductor process through a smart terminal unit without influences on the semiconductor process. In general, the pipe management of the semiconductor is performed by a person in charge using a design drawing of semiconductor process lines of a factory in which the process lines are installed. However, when the factory is being built, confirming whether facilities are accurately installed in line with the design drawing is difficult and when old facilities need to be changed, change histories are not managed so a number of cases, in which the facilities are not matched with the drawing, occur and accident risk is high. The present invention provides the semiconductor process pipe management system in which a database of VR image and pipe facility information about the pipe of the semiconductor process lines is made and registered, the facility information of each pipe and VR images are confirmed through a smart terminal unit of a semiconductor process manager based on the information, and information generated during the maintenance of the semiconductor process lines is registered and managed as facility history information through the smart terminal unit so that an emergency situation is able to be quickly handled without influences on the semiconductor process. |
