Door valve

摘要

An up and down operating actuator unit which manages upward and downward motions of an opening and closing member, and a forward and backward actuator unit which manages forward and backward motions of the opening and closing member are configured so that the opening and closing member, which opens and closes a wafer movement path, can be accurately operated in an “L”-shaped motion.

主权项

1. A door valve, comprising:
an opening and closing member 100 which opens and closes a semiconductor wafer movement path; a forward and backward actuator unit 200 which comprises: a first cylinder 210 which is installed at a back of the opening and closing member 100 and has a first flow path at an inner rear side, and a second flow path 2 at a front side, and a cover 221 installed at a front side; a first piston 220 which is installed in the interior of the first cylinder 210 and operates forward and backward by means of a compression air inputted into the first flow path and the second flow path; and a connection member B connecting the first piston 220 and the opening and closing member 100; and an up and down operating actuator unit 300 which comprises: a plurality of second cylinders 310 formed in the interior; a second piston 320 which is installed in the interior of the second cylinder 310 and moves upward and downward by means of a compression air; an upper and lower shaft 330 one side of which is connected with the second piston 320, and the other side of which is connected with the forward and backward actuator unit 200, the compression air flowing in the interior, the upper and lower shaft being formed of a third flow path 3 communicating with the first flow path 1, and a fourth flow path 4 communicating with the second flow path 2; a first compression air inlet through hole 340 formed to receive the compression air when the wafer movement path of the opening and closing member 100 is closed; a fifth flow path 5 which is connected from the first compression air inlet through hole 340 to the lower side of the second cylinder 310 so that the second piston 320 can move upward by means of the compression air inputted from the first compression air inlet through hole 340; and a sixth flow path 6 in which a relief valve R1 selectively opened when the second piston 320 reaches the top dead point by means of a compression air inputted into the fifth flow path 5 and a check valve C1 selectively opened when the second piston 320 reaches the bottom dead point are installed, the sixth flow path coming to communicate with the first compression air inlet through hole 340, the fifth flow path 5 and the first flow path 1 so that the compression air can move to the first flow path when the relief valve R1 opens.