Dry metal etching method

摘要

A method of etching an aluminum-containing layer on a substrate is described. The method includes forming plasma from a process composition containing a halogen element, and exposing the substrate to the plasma to etch the aluminum-containing layer. The method may additionally include exposing the substrate to an oxygen-containing environment to oxidize a surface of the aluminum-containing layer and control an etch rate of the aluminum-containing layer. The method may further include forming first plasma from a process composition containing HBr and an additive gas having the chemical formula CxHyRz (wherein R is a halogen element, x and y are equal to unity or greater, and z is equal to zero or greater), forming second plasma from a process composition containing HBr, and exposing the substrate to the first plasma and the second plasma to etch the aluminum-containing layer.

主权项

1. A method for etching a metal-containing layer on a substrate, comprising:
disposing a substrate having an aluminum-containing layer formed thereon in a plasma processing system; forming plasma from a process composition containing a halogen element; exposing said substrate to said plasma to etch said aluminum-containing layer while simultaneously exposing said substrate to an oxygen-containing environment to oxidize a surface of said aluminum-containing layer and control an etch rate of said aluminum-containing layer.