Multi-chamber carrier head with a textured membrane

摘要

A flexible membrane for use in a carrier head has a generally circular main portion with a lower surface, an annular outer portion for connection to a base assembly, and an annular flap extending from the main portion on a side opposite the lower surface for connection to the base assembly. At least one surface of the flap has a surface texture to prevent adhesion.

主权项

1. A flexible membrane for a carrier head of a chemical mechanical polishing system, comprising:
a generally circular main portion with an upper surface and a lower surface to provide a mounting surface for a substrate; an outer annular portion extending upwardly from an outer edge of the main portion, the outer annular portion including a rim to contact and be clamped to the carrier head; and an annular flap extending upwardly from the upper surface of the main portion at a position spaced inwardly from the outer edge, the annular flap ending in an edge portion to contact and be clamped to the carrier head, wherein the mounting surface and a surface of the annular flap between the upper surface and the edge portion have a first surface texture, and the edge portion has a different second surface texture that is smoother than the first surface texture.