| 摘要 |
Disclosed is a thin film depositing apparatus to manufacture an OLED. According to an embodiment of the present invention, the thin film depositing apparatus to manufacture the OLED includes: a scan rail separately arranged in the chamber in a longitudinal direction; and a source unit which supplies deposition materials to a substrate while moving along the scan rail and rotates in the chamber for maintenance and repair. Thereby, the source unit is easily withdrawn from the chamber by rotation if the maintenance and repair of the source unit are required. |
