MICROWAVE PLASMA STERILIZATION APPARATUS

摘要

The present invention relates to a plasma sterilization device. The plasma sterilization device, according to the present invention, comprises a reaction chamber; a vacuum-forming unit connected to the reaction chamber and forming a vacuum state inside the reaction chamber; a hydrogen peroxide supply unit for supplying hydrogen peroxide in a gas state to the inside of the reaction chamber; and a microwave plasma generating unit for generating plasma by using microwaves.