| 摘要 |
The objective of this present invention is to provide a substrate processing apparatus that is provided with an adsorption reversal device that is capable of shortening the length of operation time from substrate reversal to putting on a table for the subsequent process. For such, the substrate processing apparatus (A) is provided with a scribe device (B) that forms a scribe line on a surface of a substrate (W) and the adsorption reversal device (C) that has an adsorption unit (14) which adsorbs and reverses the scribed substrate (W) and transfers the scribed substrate (W) to a receiving unit for the subsequent process. The adsorption unit (14) of the adsorption reversal device (C) is formed into a comb tooth shape having a plurality of comb tooth portions (14a) formed in sequence in a direction orthogonal to an axial center with an axis of rotation (13) as a base end and the receiving unit is formed to have a plurality of accommodating members (24) which are arranged apart in parallel. The axis of rotation (13) is arranged in the vicinity of the table (2) of the scribe device (B) and the receiving unit (14) so that the comb tooth portions (14a) are inserted into the accommodating members (24) and the substrate (W) on the comb tooth portions (14a) can be put on the accommodating members (24) when the substrate (W) is adsorbed from the table (2) of the scribe device (B) for a reverse rotation motion. |
