X-RAY REFLECTOR AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To solve a problem caused when a silicon base plate is plastically deformed by press working under high temperature so as to be curved, in an X-ray reflector and a manufacturing method of the X-ray reflector.SOLUTION: A manufacturing method of an X-ray reflector includes: a step of providing a plurality of holes which penetrate from one surface to the other surface of a silicon base plate and whose side walls are used as X-ray reflection surfaces to the silicon base plate; and a step of plating one surface of the silicon base plate having the plurality of holes with a metal thin film so as to curve the silicon base plate by the stress of the metal thin film.