Method and Apparatus for Sample Analysis

摘要

A method of sample analysis is offered which provides improved quantitative accuracy. This method starts with irradiating a sample with an electron beam. Characteristic X-rays emanating from the sample are detected. Plural data sets about intensities of characteristic X-rays corresponding to a specific element contained in the sample are obtained. The element is quantitatively analyzed based on the plural data sets. This method includes a step (S20) for calculating quantitative values for the element for the plural data sets, respectively, about the characteristic X-ray intensities, a step (S30) for calculating weights for the quantitative values, respectively, based on the plural data sets about the characteristic X-ray intensities, and a step (S40) for calculating a weighted average of the quantitative values based on the weights.

主权项

1. A method of sample analysis for analyzing a sample by irradiating the sample with an electron beam, detecting characteristic X-rays emanating from the sample, obtaining plural data sets about intensities of characteristic X-rays corresponding to a specific element contained in the sample, and providing a quantitative analysis of the sample based on the data sets about the characteristic X-ray intensities, said method comprising the steps of:
calculating quantitative values for the element for the plural data sets, respectively, about the characteristic X-ray intensities; calculating weights for the quantitative values, respectively, based on the plural data sets about the characteristic X-ray intensities; and calculating a weighted average of the quantitative values based on the calculated weights.