发明名称 Block coploymer formulation and methods relating thereto
摘要 A block copolymer formulation is provided including a block copolymer blend including a first poly(acrylate)-b-poly(silyl acrylate) block copolymer; and, a second poly(acrylate)-b-poly(silyl acrylate) block copolymer. Also provided are substrates treated with the block copolymer formulation.
申请公布号 US2014227447(A1) 申请公布日期 2014.08.14
申请号 US201313762772 申请日期 2013.02.08
申请人 ROHM AND HAAS ELECTRONIC MATERIALS LLC 发明人 Hustad Phillip;Trefonas Peter;Gu Xinyu;Chang Shih-Wei;Ginzburg Valeriy;Vogel Erin;Murray Daniel
分类号 C09D153/00 主分类号 C09D153/00
代理机构 代理人
主权项 1. A block copolymer formulation, comprising: a block copolymer blend, comprising: a first poly(acylate)-b-poly(silyl acrylate) block copolymer (“DB1”) having a DB1 poly(acrylate) block, a DB1 poly(silyl acrylate) block and a DB1 number average molecular weight, MN-DB1, of 10 to 1,000 kg/mol; a DB1 polydispersity, PDDB1, of 1 to 3; and,a second poly(acrylate)-b-poly(silyl acrylate) block copolymer (“DB2”) having a DB2 poly(acrylate) block, a DB2 poly(silyl acrylate) block and a DB2 number average molecular weight, MN-DB2, of 1 to 1,000 kg/mol; a DB2 polydispersity, PDDB2, of 1 to 3; and, ≧2 wt % antioxidant (based on the weight of the block copolymer blend).
地址 Marlborough MA US
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