PHASE PLATE AND ELECTRON MICROSCOPE

摘要

Provided is a phase plate for use in an electron microscope which lessens the problem of image information loss caused by interruption of an electron beam and ameliorates the problem of anisotropic potential distributions. This phase plate comprises openings (23) connected into a single opening, and multiple electrodes (11) arranged in the opening from the outer portion of the opening towards the center of the opening. The cross sections of the electrodes (11) are configured such that a voltage application layer (24) comprising a conductor or a semiconductor is covered by a shield layer comprising a conductor or a semiconductor with an intermediate insulating layer. By this means, this phase plate is capable of lessening electron beam interruption due to the electrodes (11), and of ameliorating the problem of anisotropic potential distributions.

主权项

1. A phase plate used for an electron microscope, comprising:
openings connected into a single opening; and multiple electrodes arranged in the opening from an outer portion of the opening towards the center of the opening, wherein the multiple electrodes are configured to have voltage application layers each composed of a conductor or a semiconductor covered by shield layers each composed of the conductor or the semiconductor via insulators.