| 摘要 |
The present invention relates to an error detection method. According to one embodiment of the present invention, the error detection method determines that an error is occurred at a processing module when a control frequency is a standard frequency or more by measuring the control frequency included in a control signal used in the control of the processing module in the error detection method of the processing module processing a substrate. [Reference numerals] (AA) START; (BB) NO; (CC) YES; (DD) END; (S100) Calculating average movement; (S200) Detecting control frequency; (S300) Standard frequency <= control frequency; (S400) Alarm |
