发明名称 |
METAL SEED LAYER LEVELER COMPRISING ALLYL ALCOHOL AND METHOD FOR CONSTRUCTING METAL SEED LAYER USING THE SAME |
摘要 |
The present invention relates to a metal seed layer leveler containing allyl alcohol and a seed layer using the same. A method of forming a seed layer according to the present invention can form a seed layer having low roughness by adding a leveler containing allyl alcohol when metallic nanoparticles are adsorbed on high specific resistance substrate, and then an electroplating process is performed, thereby fabricating a micro pattern and solving the coating problem of different floor heights as well. |
申请公布号 |
KR20140100257(A) |
申请公布日期 |
2014.08.14 |
申请号 |
KR20130013363 |
申请日期 |
2013.02.06 |
申请人 |
INCHEON UNIVERSITY INDUSTRY ACADEMIC COOPERATION FOUNDATION |
发明人 |
KWON, OH JOONG;CHOI, IN SOO;LIM, TAE HO;KIM, KWANG HWAN |
分类号 |
H01L21/288;H01L21/28 |
主分类号 |
H01L21/288 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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