发明名称 Plasmas and methods of using them
摘要 C :NRhflbTDCC/ThR42652I.DOC-1IM)4flOI2 Plasma devices (910) and methods for using such plasma devices (910) in analytical measurements are disclosed. In certain examples, a low flow plasma may be operative using a total argon gas flow of less than about five liters per minut and in some 5 embodiments, a plasma argon gas flow of less than about four liter per minute. In other examples, a plasma produced using inductive (920) and capacitive (930, 940) coupling is disclosed. T- it 0))0 0)0 0) 0 0) 0))
申请公布号 AU2012202363(B2) 申请公布日期 2014.08.14
申请号 AU20120202363 申请日期 2012.04.16
申请人 PERKINELMER HEALTH SCIENCES, INC. 发明人 MORRISROE, PETER J.
分类号 B23K9/00;B23K10/02;G01J3/30;H01L21/00;H01L21/306;H01L21/336 主分类号 B23K9/00
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