Optical module i.e. facet mirror, for optical imaging device for microlithography, has damping device attenuating second relative movement between damping elements of damping device with respect to attenuation of first movement

摘要

The module (106.1) has an optic element (109) i.e. facet element, and a supporting structure (108) supporting the optic element. The supporting structure is provided with a mechanical damping device, which attenuates first relative movement between the optic element and the supporting element of the supporting structure. The mechanical damping device attenuates friction-affected second relative movement between a first damping element and a second damping element of the damping device with respect to the attenuation of the first relative movement. Independent claims are also included for the following: (1) an optical imaging device (2) a method for supporting an optic element (3) an optical imaging method.