发明名称 METHOD FOR FORMING SOLAR CELLS
摘要 A method for forming a thin film solar cell that includes one or more moisture barrier layer made of a water-insoluble material for protection against water and oxygen damage to the top electrode layer material is disclosed.
申请公布号 US2014227822(A1) 申请公布日期 2014.08.14
申请号 US201414258146 申请日期 2014.04.22
申请人 Taiwan Semiconductor Manufacturing Co., Ltd. 发明人 LEE Wen-Chin;CHIU Yung-Sheng;YEN Wen-Tsai;YU Liang-Sheng
分类号 H01L31/18 主分类号 H01L31/18
代理机构 代理人
主权项 1. A method for forming a thin film solar cell comprising: depositing a conductive bottom electrode layer on a substrate; cutting a first set of scribe lines in the bottom electrode layer, the first set of scribe lines forming a first set of micro-channels in the bottom electrode layer; depositing an absorber layer on the bottom electrode layer, whereby the absorber layer is interconnected to the substrate through the first set of micro-channels formed by the first set of scribe lines; depositing a buffer layer on the absorber layer; cutting a second set of scribe lines in the absorber layer, the second set of scribe lines forming a second set of micro-channels with exposed sidewalls in the absorber layer from exposed portions of the absorber layer and the buffer layer; depositing a top electrode layer on the buffer layer after cutting the second set of scribe lines, whereby material from the top electrode layer at least partially filling the second set of micro-channels and interconnect to the bottom electrode layer thereby preventing the buffer layer from acting as a barrier between the top and bottom electrode layers; and depositing a first moisture barrier layer made of a water-insoluble material on the top electrode layer, whereby all exposed surfaces of the top electrode layer material within the second set of micro-channels are covered with the first moisture barrier layer material for protection against water and oxygen damage to the top electrode layer material within the second set of micro-channels.
地址 Hsin-Chu TW