INK-JET RECORDING HEAD, RECORDING ELEMENT SUBSTRATE, METHOD FOR MANUFACTURING INK-JET RECORDING HEAD, AND METHOD FOR MANUFACTURING RECORDING ELEMENT SUBSTRATE

摘要

An ink-jet recording head includes a plurality of recording element substrates each having an ejection pressure generating element configured to generate pressure for ejecting ink from an ink discharge port. The plurality of recording element substrates each include a first surface on which the corresponding ejection pressure generating element is disposed and a second surface, serving as an end surface intersecting with the first surface, being at least partially formed by etching.

主权项

1. A method for manufacturing a recording element substrate, the method comprising:
preparing a silicon wafer including a plurality of energy generating element groups for generating energy used for ejecting a liquid; and dividing, by dry etching, the silicon wafer into a plurality of substrates, each including one of the energy generating element groups.