SEMICONDUCTOR EVALUATION DEVICE AND SEMICONDUCTOR EVALUATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor evaluation device and semiconductor evaluation method which can easily suppress the occurrence of a partial discharge in a measurement object at low cost without increasing the time required for an evaluation process.SOLUTION: A semiconductor evaluation device 1 includes: a chuck stage 3 that holds a semiconductor device 5 that is a measurement object; a contact probe 10 that contacts the semiconductor device 5 held by the chuck stage 3 so as to evaluate the electric characteristics of the semiconductor device 5; and a fluid spraying unit 7 that sprays a fluid on the semiconductor device 5.