PASSIVATION LAYER REMOVAL BY DELIVERING A SPLIT LASER PULSE

摘要

Embodiments of the present invention generally provide methods for forming features or holes in a passivation layer without damaging the underlying solar cell substrate. A source laser beam is split into a first laser beam and a second laser beam. The first laser beam is modified to have a different wavelength than the source laser beam. The second laser beam is delayed for a predetermined time, and the first and second laser beams are delivered to a surface of the substrate.

主权项

1. A method for forming a feature on a substrate, comprising:
receiving a source laser beam having a first wavelength; splitting the source laser beam to form a first laser beam and a second laser beam; modifying the first laser beam so that the first laser beam has a second wavelength; delaying the second laser beam for a predetermined time; and delivering the first and second laser beams to a surface of the substrate.