EVALUATION DEVICE OF CHARGED PARTICLE BEAM DEVICE, AND CHARGED PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an evaluation device of a charged particle beam device which can evaluate measurement error based on adhesion of contamination with high precision, and to provide a charged particle beam device. ! SOLUTION: An evaluation device of a charged particle beam device for measuring a pattern on a sample calculates the difference between a first measurement result of the pattern, and a second measurement result of the pattern, obtained by irradiating a charged particle beam for a predetermined time after obtaining the first measurement result, and then outputs the evaluation result of the charged particle beam device based on an evaluation value obtained based on the difference. A charged particle beam device is also provided. ! COPYRIGHT: (C)2014,JPO&INPIT