发明名称 OPTICAL DEVICE USING 3-DIMENSIONAL NANOPARTICLE STRUCTURE
摘要 The present invention relates to a method for manufacturing a nanoparticle structure by focused patterning of nanoparticles, and a nanoparticle structure obtained by the above method. The method of the present invention is characterized by comprising the steps of: first of all, accumulating ions generated by corona discharge on a substrate where a micro/nano pattern is formed; inducing charged nanoparticles and ions generated by spark discharge to the micro/nano pattern of the substrate; and then focused depositing on the micro/nano pattern. According to the method of the present invention, an elaborate nanoparticle structure, which has 3-dimensional shape having complicated structure, can be effectively manufactured.
申请公布号 US2014224315(A1) 申请公布日期 2014.08.14
申请号 US201314233081 申请日期 2013.01.30
申请人 Global Frontier Center for Multiscale Energy Systems ;SNU R&DB Foundation 发明人 Jung Kinam;Hahn Jung Suk;Pikhitsa Petro;Choi Hoseop;Ha Kyungyeon;Noh Seung Ryul;Kim Woong Sik;Choi Man Soo
分类号 B82B1/00;H01L31/0236 主分类号 B82B1/00
代理机构 代理人
主权项
地址 Seoul KR