| 摘要 |
<p>The invention relates to roll-to-roll type atomic layer deposition equipment, comprising: at least two drum devices used for driving a belt-like sample to be deposited; a power device used for outputting motive power to the drum devices, the power device being coupled to the drum devices; and a reaction chamber, the inside of the reaction chamber being provided with multiple gas passages and a passage intersecting with the direction of the gas passages and used for the sample to be deposited to pass through, and multiple gas inlets and gas outlets corresponding to the multiple gas passages being provided on the reaction chamber. The invention also relates to a method for atomic layer deposition using the aforementioned roll-to-roll type atomic deposition layer equipment. The roll to roll type atomic deposition layer equipment and the method of use thereof can perform atomic layer deposition under atmospheric pressure and even in an atmospheric environment, and allow a continuous production, meeting the requirements of large-scale industrial production.</p> |
