METHOD FOR COATING AND/OR APPLICATION ONTO MAGNETIC RINGS OF ROTOR MAGNETIC BEARING, ROTOR MAGNETIC BEARING, AND VACUUM PUMP

摘要

PROBLEM TO BE SOLVED: To provide a method of coating and/or application onto magnetic rings of a rotor magnetic bearing without influencing rotation balance in a rotor used for a vacuum pump.SOLUTION: In the rotor used for the vacuum pump, magnetic rings 4 of magnetic bearing of a rotor 1 is disposed at a location 3 provided for the magnetic rings 4, and exposed surfaces of the magnetic rings 4 are subjected to coating and/or application.