| 摘要 |
PROBLEM TO BE SOLVED: To eliminate a dead zone with relatively simple treatment to detect shape abnormality of convex shapes over all areas of an inspection surface.SOLUTION: An inspection apparatus comprises: a lighting device that emits line-segment-shaped inspection light rays extending in a first direction and that is arranged with a plurality of kinds of light sources, where the wavelengths of the inspection light rays can be optically separated and are mutually different, sequentially and repeatedly in a second direction intersecting the first direction; an imaging unit for receiving inspection light rays reflected by an inspection surface of an object to be inspected to image the inspection surface; a drive unit for moving the object to be inspected in the first direction during inspection; an extraction unit that performs color separation processing on the captured image to extract, for each color, a pixel region where the ratio between the difference, between a reflected light quantity in a target pixel or in a target pixel region and an average reflected light quantity in peripheral pixels of the target pixel or peripheral pixel regions of the target pixel region, and the average reflected light quantity is a predetermined value or more; and a detection unit for detecting, for each color, shape abnormality of convex shapes of the inspection surface on the basis of a pixel or a pixel region where the ratio between the difference and the average reflected light quantity is a predetermined value or more. |
