MANUFACTURING METHOD OF VAPOR DEPOSITION MASK, AND LASER BEAM MACHINING DEVICE

摘要

PROBLEM TO BE SOLVED: To improve forming position accuracy of an opening pattern by laser beam machining.SOLUTION: A vapor deposition mask comprises a resin film in which a plurality of penetration opening patterns are formed and a magnetic metal member which is provided in close contact with one surface of the film and including a plurality of through-holes having size to include at least one of the plurality of opening patterns. A manufacturing method of the vapor deposition mask includes: a first step of forming a mask member having a structure where the magnetic metal member including the through-holes is brought into close contact with one surface of the film; a second step of penetrating the film by irradiating a predetermined regular position in the plurality of through holes with a laser beam, and forming a plurality of preliminary opening patterns which are shaped to be included in the opening patterns; and a third step of performing laser beam machining on the opening patterns on the plurality of preliminary opening patterns.