VERTICAL ELECTROMECHANICAL SWITCH DEVICE AND METHOD FOR MANUFACTURING THE SAME

摘要

The disclosed technology relates generally to electromechanical devices, and relates more specifically to a nanoelectromechanical switch device and a method for manufacturing the same. In one aspect, an electromechanical device includes a first electrode stack and a second electrode stack, both electrode stacks extending in a vertical direction relative to a substrate surface and being spaced apart by a gap. The electromechanical device additionally includes a third electrode stack comprising a beam extending in a vertical direction in the electrode gap and being spaced apart from the first electrode stack by a first gap, from the second electrode stack by a second gap, and from the substrate by a third gap; and a connector portion overlapping the first and second electrode stacks, wherein, in operation, the beam is movable in a first direction so as to electrically connect with the first electrode stack or in a second direction so as to electrically connect with the second electrode stack, and, in a rest position, the beam is isolated from the first and the second electrode stacks. Additionally, at least one of the first or second electrode stacks comprises two electrodes including a top electrode stacked over a bottom electrode, wherein the top and bottom electrodes are separated by an electrical insulator.

主权项

1. An electromechanical device comprising:
a first electrode stack and a second electrode stack, both electrode stacks extending in a vertical direction relative to a substrate surface and being spaced apart by a gap; and a third electrode stack comprising a beam extending in a vertical direction in the electrode gap and being spaced apart from the first electrode stack by a first gap, from the second electrode stack by a second gap, and from the substrate by a third gap; and a connector portion overlapping the first and second electrode stacks, wherein, in operation, the beam is movable in a first direction so as to electrically connect with the first electrode stack or in a second direction so as to electrically connect with the second electrode stack, and, in a rest position, the beam is isolated from the first and the second electrode stacks; wherein at least one of the first or second electrode stacks comprises two electrodes including a top electrode stacked over a bottom electrode, wherein the top and bottom electrodes are separated by an electrical insulator.