| 摘要 |
A bending of the outer periphery of a film-shaped substrate, which is supported by a pair of return members from the lower side and is returned along a return path, can be decently corrected when supporting and fixing the film-shaped substrate in a working position. An elevator driving unit which elevates at least one side between a backup member (41) and a substrate pressing member (431, 432) is prepared. The elevator driving unit elevates the backup member and/or descends the substrate pressing member with a pair of conveyors (225, 226). Therefore, the substrate can be supported by the backup member from the lower side, can be separated apart from the conveyors to the upper side, and the outer surface of the substrate can be pressed downwards by the substrate pressing member. |
