| 摘要 |
A method for forming an organic material pattern using an electron beam includes a first step of preparing a first substrate including a base material layer and a transfer layer composed of an organic material, and a second substrate to transfer the organic material pattern; a second step of stacking the first substrate on the second substrate to make the transfer layer of the first substrate face the second substrate; and a third step of emitting the electron beam to a corresponding region of the base material layer of the first substrate to form the pattern on the second substrate. |
