发明名称 |
Method of Forming Nano Crystals and Method of Manufacturing Organic Light-Emitting Display Apparatus Including Thin Film Having the Same |
摘要 |
A method of forming nanocrystals and a method of manufacturing an organic light-emitting display apparatus that includes a metal compound thin film having the nanocrystals. The method of forming nanocrystals includes forming a metal compound thin film under a first pressure by using a reactive sputtering process, and forming the nanocrystals in the metal compound thin film under a second pressure that is lower than the first pressure by using the reactive sputtering process. |
申请公布号 |
EP2765625(A1) |
申请公布日期 |
2014.08.13 |
申请号 |
EP20130185720 |
申请日期 |
2013.09.24 |
申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
HUH, MYUNG-SOO;ROH, CHEOL-LAE;CHOI, SEUNG-HO |
分类号 |
H01L51/52;C23C14/00 |
主分类号 |
H01L51/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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