METHOD FOR FABRICATING MICROARRAYS OF SOFT MATERIALS

摘要

A method for fabricating a microarray of plural kinds of soft materials using a poly(paraxylylene) resin lift-off method, includes: a process of vapor-depositing a poly(para-xylylene) resin of a first layer on a substrate, forming a first micro pattern in the poly(para-xylylene) resin of the first layer; obtaining a substrate on which a first microarray is formed by pouring a solution of a first soft material, freeze-drying the first soft material so as to obtain a micro-arrayed substrate of the freeze-dried first soft material; a process of vapor-depositing a poly(para-xylylene) resin of a second layer on the micro-arrayed substrate of the freeze-dried first soft material, forming a second micro pattern in a place different from the first micro pattern by penetrating the poly(para-xylylene) resin of the first layer and the second layer, forming a second microarray on the substrate by pouring a solution including a second soft material; and a process of forming a microarray of the first and the second soft materials on the same substrate by peeling off the poly(para-xylylene) resin of the first layer and the second layer.