DEVICE, X-RAY IRRADIATION METHOD, AND MANUFACTURING METHOD FOR STRUCTURE

摘要

A device capable of suppressing reduction in detection precision is provided. There is provided an apparatus configured to irradiate an object with an X-ray and detect a transmission X-ray transmitted through the object, including: a chamber member defining a first space; and a first supply port arranged in the first space to supply a temperature-controlled gas to a part of an X-ray source configured to irradiate the object with the X-ray.