| 摘要 |
The present invention, for a faraday cup for electron beam alignment which aligns an electron beam of various sizes, includes a housing which is combined to an electron gun and has an opening; a first probe which is combined to the housing to be rotated and allows elections emitted from the electron gun to collide; a shaft which allows the first probe to be combined to the housing to be rotated; and a second probe which is combined to the housing and allows the electrons penetrating the first probe to collide. At least parts of the electrons pass through the first probe. The first probe is arranged in the opening of the housing and includes holes which have different sizes and center axes which intersect with each other. |
