APPARATUS AND METHOD FOR COATING SUBSTRATES USING THE EB/PVD PROCESS

摘要

The coating device has several crucibles (4) that are arranged on a rotatable crucible head (3) in a frame, and connected to a shaft. An electron gun bombards the electron ray for vaporization in the crucibles containing seaweed material. A dummy crucible (6) is arranged in the center of crucible head, in which electron gun is made to rest during rotation of crucible head. At least one shaft and lifting device are provided for lateral displacement of each crucible. An independent claim is included for method for operating a device for coating the substrate.