| 摘要 |
PROBLEM TO BE SOLVED: To solve such a problem that the beam condition on an object to be machined can not be measured with high accuracy during a machining period. SOLUTION: A laser beam is emitted from a laser beam source. The object to be machined is held with a holding table in a position which is crossed with the route of a laser beam which is emitted from the laser beam source. A transmission window for transmitting the laser beam is provided on the holding table. One side of the route of the laser beam emitted from the laser beam source and the holding table is moved to the other side by a moving mechanism. The laser beam is made incident on the object to be machined during the moving and the transmission window traverses the route of the laser beam. A beam measuring instrument is arranged in the position on which the laser beam transmitted through the transmission window is made incident. COPYRIGHT: (C)2012,JPO&INPIT |
